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  • Utilities (Description of Service, Drawings, Operation Manuals, etc.)
    • Electrical
    • Cooling Water
    • Instrument Air
    • Process Air
    • Process Nitrogen
    • Backup Power
    • SCADA connections
    • Backup HMI/MMI UPS
  • Instrument Calibration status
    • Log of Controlling Instruments
    • Instrument Tags
  • Vendor Supplied Data
    • Calculated evacuation time for the chamber
    • Chamber + Condenser Void Volume
    • Vendor specified leak rate
    • Shelf temperature variation and method of vendor measurement
    • Stoppering Ram diameter
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© 2005 Narlin Bennet Beaty, Ph.D.